7/20/2010	9:50:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2010	9:50:26 AM	Recipe started at 9:50 AM
7/20/2010	9:50:27 AM	H2 valve closed
7/20/2010	9:50:27 AM	BCl3 valve closed
7/20/2010	9:50:27 AM	PH3 valve closed
7/20/2010	9:50:27 AM	SiCl4 pre valve closed
7/20/2010	9:50:27 AM	SiCl4 post valve closed
7/20/2010	9:50:27 AM	Main Vac valve closed
7/20/2010	9:50:27 AM	Bypass valve closed
7/20/2010	9:50:27 AM	Bubbler valve closed
7/20/2010	9:50:27 AM	Helium valve opened
7/20/2010	9:50:27 AM	Helium MFC set to  500.000000
7/20/2010	9:50:27 AM	H2 MFC set to  0.000000
7/20/2010	9:50:27 AM	BCl3 MFC set to  0.000000
7/20/2010	9:50:27 AM	PHl3 MFC set to  0.000000
7/20/2010	9:50:27 AM	SiCl4 MFC set to  0.000000
7/20/2010	9:50:27 AM	Bypass solenoid MFC set to  0.000000
7/20/2010	9:50:27 AM	Tube furnace set to 0
7/20/2010	10:06:47 AM	Helium valve closed
7/20/2010	10:06:47 AM	H2 valve closed
7/20/2010	10:06:47 AM	BCl3 valve closed
7/20/2010	10:06:47 AM	PH3 valve closed
7/20/2010	10:06:47 AM	SiCl4 pre valve closed
7/20/2010	10:06:47 AM	SiCl4 post valve closed
7/20/2010	10:06:47 AM	Main Vac valve closed
7/20/2010	10:06:47 AM	Bypass valve closed
7/20/2010	10:06:47 AM	Bubbler valve closed
7/20/2010	10:06:47 AM	Helium MFC set to  0.000000
7/20/2010	10:06:47 AM	H2 MFC set to  0.000000
7/20/2010	10:06:47 AM	BCl3 MFC set to  0.000000
7/20/2010	10:06:47 AM	PHl3 MFC set to  0.000000
7/20/2010	10:06:47 AM	SiCl4 MFC set to  0.000000
7/20/2010	10:06:47 AM	Bypass solenoid MFC set to  0.000000
7/20/2010	10:06:47 AM	Tube furnace set to 0
7/20/2010	10:06:47 AM	Run finished at 10:06 AM
7/20/2010	10:06:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2010	10:07:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	10:07:40 AM	Recipe started at 10:07 AM
7/20/2010	10:07:40 AM	Helium valve closed
7/20/2010	10:07:40 AM	H2 valve closed
7/20/2010	10:07:40 AM	BCl3 valve closed
7/20/2010	10:07:40 AM	PH3 valve closed
7/20/2010	10:07:40 AM	SiCl4 pre valve closed
7/20/2010	10:07:40 AM	SiCl4 post valve closed
7/20/2010	10:07:40 AM	Main Vac valve closed
7/20/2010	10:07:40 AM	Bubbler valve closed
7/20/2010	10:07:40 AM	Bypass valve opened
7/20/2010	10:07:40 AM	Helium MFC set to  0.000000
7/20/2010	10:07:40 AM	H2 MFC set to  0.000000
7/20/2010	10:07:40 AM	BCl3 MFC set to  0.000000
7/20/2010	10:07:40 AM	PHl3 MFC set to  0.000000
7/20/2010	10:07:40 AM	SiCl4 MFC set to  0.000000
7/20/2010	10:07:40 AM	Bypass solenoid MFC set to  0.000000
7/20/2010	10:07:40 AM	Tube furnace set to 0
7/20/2010	10:08:12 AM	Helium valve closed
7/20/2010	10:08:12 AM	H2 valve closed
7/20/2010	10:08:12 AM	BCl3 valve closed
7/20/2010	10:08:12 AM	PH3 valve closed
7/20/2010	10:08:12 AM	SiCl4 pre valve closed
7/20/2010	10:08:12 AM	SiCl4 post valve closed
7/20/2010	10:08:12 AM	Bubbler valve closed
7/20/2010	10:08:12 AM	Main Vac valve opened
7/20/2010	10:08:12 AM	Bypass valve opened
7/20/2010	10:08:12 AM	Helium MFC set to  0.000000
7/20/2010	10:08:12 AM	H2 MFC set to  0.000000
7/20/2010	10:08:12 AM	BCl3 MFC set to  0.000000
7/20/2010	10:08:12 AM	PHl3 MFC set to  0.000000
7/20/2010	10:08:12 AM	SiCl4 MFC set to  0.000000
7/20/2010	10:08:12 AM	Bypass solenoid MFC set to  0.000000
7/20/2010	10:08:12 AM	Tube furnace set to 0
7/20/2010	10:08:12 AM	Run finished at 10:08 AM
7/20/2010	10:08:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	1:25:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2010	1:25:42 PM	Recipe started at 1:25 PM
7/20/2010	1:25:42 PM	H2 valve closed
7/20/2010	1:25:42 PM	BCl3 valve closed
7/20/2010	1:25:42 PM	PH3 valve closed
7/20/2010	1:25:42 PM	SiCl4 pre valve closed
7/20/2010	1:25:42 PM	SiCl4 post valve closed
7/20/2010	1:25:42 PM	Main Vac valve closed
7/20/2010	1:25:42 PM	Bypass valve closed
7/20/2010	1:25:42 PM	Bubbler valve closed
7/20/2010	1:25:42 PM	Helium valve opened
7/20/2010	1:25:42 PM	Helium MFC set to  500.000000
7/20/2010	1:25:42 PM	H2 MFC set to  0.000000
7/20/2010	1:25:42 PM	BCl3 MFC set to  0.000000
7/20/2010	1:25:42 PM	PHl3 MFC set to  0.000000
7/20/2010	1:25:42 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:25:42 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:25:43 PM	Tube furnace set to 0
7/20/2010	1:27:02 PM	Helium valve closed
7/20/2010	1:27:02 PM	H2 valve closed
7/20/2010	1:27:02 PM	BCl3 valve closed
7/20/2010	1:27:02 PM	PH3 valve closed
7/20/2010	1:27:02 PM	SiCl4 pre valve closed
7/20/2010	1:27:02 PM	SiCl4 post valve closed
7/20/2010	1:27:02 PM	Main Vac valve closed
7/20/2010	1:27:02 PM	Bypass valve closed
7/20/2010	1:27:02 PM	Bubbler valve closed
7/20/2010	1:27:02 PM	Helium MFC set to  0.000000
7/20/2010	1:27:02 PM	H2 MFC set to  0.000000
7/20/2010	1:27:02 PM	BCl3 MFC set to  0.000000
7/20/2010	1:27:02 PM	PHl3 MFC set to  0.000000
7/20/2010	1:27:02 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:27:02 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:27:02 PM	Tube furnace set to 0
7/20/2010	1:27:03 PM	Run finished at 1:27 PM
7/20/2010	1:27:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2010	1:31:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	1:31:38 PM	Recipe started at 1:31 PM
7/20/2010	1:31:38 PM	Helium valve closed
7/20/2010	1:31:38 PM	H2 valve closed
7/20/2010	1:31:38 PM	BCl3 valve closed
7/20/2010	1:31:38 PM	PH3 valve closed
7/20/2010	1:31:38 PM	SiCl4 pre valve closed
7/20/2010	1:31:38 PM	SiCl4 post valve closed
7/20/2010	1:31:38 PM	Main Vac valve closed
7/20/2010	1:31:38 PM	Bubbler valve closed
7/20/2010	1:31:38 PM	Bypass valve opened
7/20/2010	1:31:38 PM	Helium MFC set to  0.000000
7/20/2010	1:31:38 PM	H2 MFC set to  0.000000
7/20/2010	1:31:38 PM	BCl3 MFC set to  0.000000
7/20/2010	1:31:38 PM	PHl3 MFC set to  0.000000
7/20/2010	1:31:38 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:31:38 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:31:38 PM	Tube furnace set to 0
7/20/2010	1:32:13 PM	Helium valve closed
7/20/2010	1:32:13 PM	H2 valve closed
7/20/2010	1:32:13 PM	BCl3 valve closed
7/20/2010	1:32:13 PM	PH3 valve closed
7/20/2010	1:32:13 PM	SiCl4 pre valve closed
7/20/2010	1:32:13 PM	SiCl4 post valve closed
7/20/2010	1:32:13 PM	Bubbler valve closed
7/20/2010	1:32:13 PM	Main Vac valve opened
7/20/2010	1:32:13 PM	Bypass valve opened
7/20/2010	1:32:13 PM	Helium MFC set to  0.000000
7/20/2010	1:32:13 PM	H2 MFC set to  0.000000
7/20/2010	1:32:13 PM	BCl3 MFC set to  0.000000
7/20/2010	1:32:13 PM	PHl3 MFC set to  0.000000
7/20/2010	1:32:13 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:32:13 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:32:14 PM	Tube furnace set to 0
7/20/2010	1:32:14 PM	Run finished at 1:32 PM
7/20/2010	1:32:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	1:33:38 PM	Recipe started at 1:33 PM
7/20/2010	1:33:38 PM	H2 valve closed
7/20/2010	1:33:38 PM	BCl3 valve closed
7/20/2010	1:33:38 PM	PH3 valve closed
7/20/2010	1:33:38 PM	SiCl4 pre valve closed
7/20/2010	1:33:38 PM	SiCl4 post valve closed
7/20/2010	1:33:38 PM	Main Vac valve closed
7/20/2010	1:33:38 PM	Bypass valve closed
7/20/2010	1:33:38 PM	Bubbler valve closed
7/20/2010	1:33:38 PM	Helium valve opened
7/20/2010	1:33:38 PM	Helium MFC set to  500.000000
7/20/2010	1:33:38 PM	H2 MFC set to  0.000000
7/20/2010	1:33:38 PM	BCl3 MFC set to  0.000000
7/20/2010	1:33:38 PM	PHl3 MFC set to  0.000000
7/20/2010	1:33:38 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:33:38 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:33:38 PM	Tube furnace set to 80
7/20/2010	1:34:22 PM	Helium valve closed
7/20/2010	1:34:22 PM	H2 valve closed
7/20/2010	1:34:22 PM	BCl3 valve closed
7/20/2010	1:34:22 PM	PH3 valve closed
7/20/2010	1:34:22 PM	SiCl4 pre valve closed
7/20/2010	1:34:22 PM	SiCl4 post valve closed
7/20/2010	1:34:22 PM	Main Vac valve closed
7/20/2010	1:34:22 PM	Bypass valve closed
7/20/2010	1:34:22 PM	Bubbler valve closed
7/20/2010	1:34:22 PM	Helium MFC set to  0.000000
7/20/2010	1:34:22 PM	H2 MFC set to  0.000000
7/20/2010	1:34:22 PM	BCl3 MFC set to  0.000000
7/20/2010	1:34:22 PM	PHl3 MFC set to  0.000000
7/20/2010	1:34:22 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:34:22 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:34:22 PM	Tube furnace set to 80
7/20/2010	1:34:37 PM	Helium valve closed
7/20/2010	1:34:37 PM	H2 valve closed
7/20/2010	1:34:37 PM	BCl3 valve closed
7/20/2010	1:34:37 PM	PH3 valve closed
7/20/2010	1:34:37 PM	SiCl4 pre valve closed
7/20/2010	1:34:37 PM	SiCl4 post valve closed
7/20/2010	1:34:37 PM	Main Vac valve closed
7/20/2010	1:34:37 PM	Bubbler valve closed
7/20/2010	1:34:37 PM	Bypass valve opened
7/20/2010	1:34:37 PM	Helium MFC set to  0.000000
7/20/2010	1:34:37 PM	H2 MFC set to  0.000000
7/20/2010	1:34:37 PM	BCl3 MFC set to  0.000000
7/20/2010	1:34:37 PM	PHl3 MFC set to  0.000000
7/20/2010	1:34:37 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:34:37 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:34:37 PM	Tube furnace set to 80
7/20/2010	1:34:59 PM	Helium valve closed
7/20/2010	1:34:59 PM	H2 valve closed
7/20/2010	1:34:59 PM	BCl3 valve closed
7/20/2010	1:34:59 PM	PH3 valve closed
7/20/2010	1:34:59 PM	SiCl4 pre valve closed
7/20/2010	1:34:59 PM	SiCl4 post valve closed
7/20/2010	1:34:59 PM	Bubbler valve closed
7/20/2010	1:34:59 PM	Main Vac valve opened
7/20/2010	1:34:59 PM	Bypass valve opened
7/20/2010	1:34:59 PM	Helium MFC set to  0.000000
7/20/2010	1:34:59 PM	H2 MFC set to  0.000000
7/20/2010	1:34:59 PM	BCl3 MFC set to  0.000000
7/20/2010	1:34:59 PM	PHl3 MFC set to  0.000000
7/20/2010	1:34:59 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:34:59 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:34:59 PM	Tube furnace set to 80
7/20/2010	1:37:59 PM	H2 valve closed
7/20/2010	1:37:59 PM	BCl3 valve closed
7/20/2010	1:37:59 PM	PH3 valve closed
7/20/2010	1:37:59 PM	SiCl4 pre valve closed
7/20/2010	1:37:59 PM	SiCl4 post valve closed
7/20/2010	1:37:59 PM	Main Vac valve closed
7/20/2010	1:37:59 PM	Bypass valve closed
7/20/2010	1:37:59 PM	Bubbler valve closed
7/20/2010	1:37:59 PM	Helium valve opened
7/20/2010	1:37:59 PM	Helium MFC set to  500.000000
7/20/2010	1:37:59 PM	H2 MFC set to  0.000000
7/20/2010	1:37:59 PM	BCl3 MFC set to  0.000000
7/20/2010	1:37:59 PM	PHl3 MFC set to  0.000000
7/20/2010	1:37:59 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:37:59 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:37:59 PM	Tube furnace set to 80
7/20/2010	1:38:42 PM	Helium valve closed
7/20/2010	1:38:42 PM	H2 valve closed
7/20/2010	1:38:42 PM	BCl3 valve closed
7/20/2010	1:38:42 PM	PH3 valve closed
7/20/2010	1:38:42 PM	SiCl4 pre valve closed
7/20/2010	1:38:42 PM	SiCl4 post valve closed
7/20/2010	1:38:42 PM	Main Vac valve closed
7/20/2010	1:38:42 PM	Bypass valve closed
7/20/2010	1:38:42 PM	Bubbler valve closed
7/20/2010	1:38:42 PM	Helium MFC set to  0.000000
7/20/2010	1:38:42 PM	H2 MFC set to  0.000000
7/20/2010	1:38:42 PM	BCl3 MFC set to  0.000000
7/20/2010	1:38:42 PM	PHl3 MFC set to  0.000000
7/20/2010	1:38:42 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:38:42 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:38:42 PM	Tube furnace set to 80
7/20/2010	1:38:57 PM	Helium valve closed
7/20/2010	1:38:57 PM	H2 valve closed
7/20/2010	1:38:57 PM	BCl3 valve closed
7/20/2010	1:38:57 PM	PH3 valve closed
7/20/2010	1:38:57 PM	SiCl4 pre valve closed
7/20/2010	1:38:57 PM	SiCl4 post valve closed
7/20/2010	1:38:57 PM	Main Vac valve closed
7/20/2010	1:38:57 PM	Bubbler valve closed
7/20/2010	1:38:57 PM	Bypass valve opened
7/20/2010	1:38:57 PM	Helium MFC set to  0.000000
7/20/2010	1:38:57 PM	H2 MFC set to  0.000000
7/20/2010	1:38:57 PM	BCl3 MFC set to  0.000000
7/20/2010	1:38:57 PM	PHl3 MFC set to  0.000000
7/20/2010	1:38:57 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:38:57 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:38:57 PM	Tube furnace set to 80
7/20/2010	1:39:19 PM	Helium valve closed
7/20/2010	1:39:19 PM	H2 valve closed
7/20/2010	1:39:19 PM	BCl3 valve closed
7/20/2010	1:39:19 PM	PH3 valve closed
7/20/2010	1:39:19 PM	SiCl4 pre valve closed
7/20/2010	1:39:19 PM	SiCl4 post valve closed
7/20/2010	1:39:19 PM	Bubbler valve closed
7/20/2010	1:39:19 PM	Main Vac valve opened
7/20/2010	1:39:19 PM	Bypass valve opened
7/20/2010	1:39:19 PM	Helium MFC set to  0.000000
7/20/2010	1:39:19 PM	H2 MFC set to  0.000000
7/20/2010	1:39:19 PM	BCl3 MFC set to  0.000000
7/20/2010	1:39:19 PM	PHl3 MFC set to  0.000000
7/20/2010	1:39:19 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:39:19 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:39:19 PM	Tube furnace set to 80
7/20/2010	1:42:19 PM	H2 valve closed
7/20/2010	1:42:19 PM	BCl3 valve closed
7/20/2010	1:42:19 PM	PH3 valve closed
7/20/2010	1:42:19 PM	SiCl4 pre valve closed
7/20/2010	1:42:19 PM	SiCl4 post valve closed
7/20/2010	1:42:19 PM	Main Vac valve closed
7/20/2010	1:42:19 PM	Bypass valve closed
7/20/2010	1:42:19 PM	Bubbler valve closed
7/20/2010	1:42:19 PM	Helium valve opened
7/20/2010	1:42:19 PM	Helium MFC set to  500.000000
7/20/2010	1:42:19 PM	H2 MFC set to  0.000000
7/20/2010	1:42:19 PM	BCl3 MFC set to  0.000000
7/20/2010	1:42:19 PM	PHl3 MFC set to  0.000000
7/20/2010	1:42:19 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:42:19 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:42:19 PM	Tube furnace set to 80
7/20/2010	1:43:01 PM	Helium valve closed
7/20/2010	1:43:01 PM	H2 valve closed
7/20/2010	1:43:01 PM	BCl3 valve closed
7/20/2010	1:43:01 PM	PH3 valve closed
7/20/2010	1:43:01 PM	SiCl4 pre valve closed
7/20/2010	1:43:01 PM	SiCl4 post valve closed
7/20/2010	1:43:01 PM	Main Vac valve closed
7/20/2010	1:43:01 PM	Bypass valve closed
7/20/2010	1:43:01 PM	Bubbler valve closed
7/20/2010	1:43:01 PM	Helium MFC set to  0.000000
7/20/2010	1:43:01 PM	H2 MFC set to  0.000000
7/20/2010	1:43:01 PM	BCl3 MFC set to  0.000000
7/20/2010	1:43:01 PM	PHl3 MFC set to  0.000000
7/20/2010	1:43:01 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:43:01 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:43:01 PM	Tube furnace set to 80
7/20/2010	1:43:16 PM	Helium valve closed
7/20/2010	1:43:16 PM	H2 valve closed
7/20/2010	1:43:16 PM	BCl3 valve closed
7/20/2010	1:43:16 PM	PH3 valve closed
7/20/2010	1:43:16 PM	SiCl4 pre valve closed
7/20/2010	1:43:16 PM	SiCl4 post valve closed
7/20/2010	1:43:16 PM	Main Vac valve closed
7/20/2010	1:43:16 PM	Bubbler valve closed
7/20/2010	1:43:16 PM	Bypass valve opened
7/20/2010	1:43:16 PM	Helium MFC set to  0.000000
7/20/2010	1:43:16 PM	H2 MFC set to  0.000000
7/20/2010	1:43:16 PM	BCl3 MFC set to  0.000000
7/20/2010	1:43:16 PM	PHl3 MFC set to  0.000000
7/20/2010	1:43:16 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:43:16 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:43:16 PM	Tube furnace set to 80
7/20/2010	1:43:38 PM	Helium valve closed
7/20/2010	1:43:38 PM	H2 valve closed
7/20/2010	1:43:38 PM	BCl3 valve closed
7/20/2010	1:43:38 PM	PH3 valve closed
7/20/2010	1:43:38 PM	SiCl4 pre valve closed
7/20/2010	1:43:38 PM	SiCl4 post valve closed
7/20/2010	1:43:38 PM	Bubbler valve closed
7/20/2010	1:43:38 PM	Main Vac valve opened
7/20/2010	1:43:38 PM	Bypass valve opened
7/20/2010	1:43:38 PM	Helium MFC set to  0.000000
7/20/2010	1:43:38 PM	H2 MFC set to  0.000000
7/20/2010	1:43:38 PM	BCl3 MFC set to  0.000000
7/20/2010	1:43:38 PM	PHl3 MFC set to  0.000000
7/20/2010	1:43:38 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:43:38 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:43:38 PM	Tube furnace set to 80
7/20/2010	1:46:38 PM	Helium valve closed
7/20/2010	1:46:38 PM	H2 valve closed
7/20/2010	1:46:38 PM	BCl3 valve closed
7/20/2010	1:46:38 PM	PH3 valve closed
7/20/2010	1:46:38 PM	SiCl4 pre valve closed
7/20/2010	1:46:38 PM	SiCl4 post valve closed
7/20/2010	1:46:38 PM	Bubbler valve closed
7/20/2010	1:46:38 PM	Main Vac valve opened
7/20/2010	1:46:38 PM	Bypass valve opened
7/20/2010	1:46:38 PM	Helium MFC set to  0.000000
7/20/2010	1:46:38 PM	H2 MFC set to  0.000000
7/20/2010	1:46:38 PM	BCl3 MFC set to  0.000000
7/20/2010	1:46:38 PM	PHl3 MFC set to  0.000000
7/20/2010	1:46:38 PM	SiCl4 MFC set to  0.000000
7/20/2010	1:46:38 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	1:46:38 PM	Tube furnace set to 0
7/20/2010	1:46:39 PM	Run finished at 1:46 PM
7/20/2010	2:55:56 PM	Recipe started at 2:55 PM
7/20/2010	2:55:56 PM	H2 valve closed
7/20/2010	2:55:56 PM	BCl3 valve closed
7/20/2010	2:55:56 PM	PH3 valve closed
7/20/2010	2:55:56 PM	SiCl4 pre valve closed
7/20/2010	2:55:56 PM	SiCl4 post valve closed
7/20/2010	2:55:56 PM	Main Vac valve closed
7/20/2010	2:55:56 PM	Bypass valve closed
7/20/2010	2:55:56 PM	Bubbler valve closed
7/20/2010	2:55:56 PM	Helium valve opened
7/20/2010	2:55:56 PM	Helium MFC set to  500.000000
7/20/2010	2:55:56 PM	H2 MFC set to  0.000000
7/20/2010	2:55:56 PM	BCl3 MFC set to  0.000000
7/20/2010	2:55:56 PM	PHl3 MFC set to  0.000000
7/20/2010	2:55:56 PM	SiCl4 MFC set to  0.000000
7/20/2010	2:55:56 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	2:55:56 PM	Tube furnace set to 80
7/20/2010	2:56:39 PM	Helium valve closed
7/20/2010	2:56:39 PM	H2 valve closed
7/20/2010	2:56:39 PM	BCl3 valve closed
7/20/2010	2:56:39 PM	PH3 valve closed
7/20/2010	2:56:39 PM	SiCl4 pre valve closed
7/20/2010	2:56:39 PM	SiCl4 post valve closed
7/20/2010	2:56:39 PM	Main Vac valve closed
7/20/2010	2:56:39 PM	Bypass valve closed
7/20/2010	2:56:39 PM	Bubbler valve closed
7/20/2010	2:56:39 PM	Helium MFC set to  0.000000
7/20/2010	2:56:39 PM	H2 MFC set to  0.000000
7/20/2010	2:56:39 PM	BCl3 MFC set to  0.000000
7/20/2010	2:56:39 PM	PHl3 MFC set to  0.000000
7/20/2010	2:56:39 PM	SiCl4 MFC set to  0.000000
7/20/2010	2:56:39 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	2:56:39 PM	Tube furnace set to 80
7/20/2010	2:56:54 PM	Helium valve closed
7/20/2010	2:56:54 PM	H2 valve closed
7/20/2010	2:56:54 PM	BCl3 valve closed
7/20/2010	2:56:54 PM	PH3 valve closed
7/20/2010	2:56:54 PM	SiCl4 pre valve closed
7/20/2010	2:56:54 PM	SiCl4 post valve closed
7/20/2010	2:56:54 PM	Main Vac valve closed
7/20/2010	2:56:54 PM	Bubbler valve closed
7/20/2010	2:56:54 PM	Bypass valve opened
7/20/2010	2:56:54 PM	Helium MFC set to  0.000000
7/20/2010	2:56:54 PM	H2 MFC set to  0.000000
7/20/2010	2:56:54 PM	BCl3 MFC set to  0.000000
7/20/2010	2:56:54 PM	PHl3 MFC set to  0.000000
7/20/2010	2:56:54 PM	SiCl4 MFC set to  0.000000
7/20/2010	2:56:54 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	2:56:54 PM	Tube furnace set to 80
7/20/2010	2:57:16 PM	Helium valve closed
7/20/2010	2:57:16 PM	H2 valve closed
7/20/2010	2:57:16 PM	BCl3 valve closed
7/20/2010	2:57:16 PM	PH3 valve closed
7/20/2010	2:57:16 PM	SiCl4 pre valve closed
7/20/2010	2:57:16 PM	SiCl4 post valve closed
7/20/2010	2:57:16 PM	Bubbler valve closed
7/20/2010	2:57:16 PM	Main Vac valve opened
7/20/2010	2:57:16 PM	Bypass valve opened
7/20/2010	2:57:16 PM	Helium MFC set to  0.000000
7/20/2010	2:57:16 PM	H2 MFC set to  0.000000
7/20/2010	2:57:16 PM	BCl3 MFC set to  0.000000
7/20/2010	2:57:16 PM	PHl3 MFC set to  0.000000
7/20/2010	2:57:16 PM	SiCl4 MFC set to  0.000000
7/20/2010	2:57:16 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	2:57:16 PM	Tube furnace set to 80
7/20/2010	3:00:16 PM	H2 valve closed
7/20/2010	3:00:16 PM	BCl3 valve closed
7/20/2010	3:00:16 PM	PH3 valve closed
7/20/2010	3:00:16 PM	SiCl4 pre valve closed
7/20/2010	3:00:16 PM	SiCl4 post valve closed
7/20/2010	3:00:16 PM	Main Vac valve closed
7/20/2010	3:00:16 PM	Bypass valve closed
7/20/2010	3:00:16 PM	Bubbler valve closed
7/20/2010	3:00:16 PM	Helium valve opened
7/20/2010	3:00:16 PM	Helium MFC set to  500.000000
7/20/2010	3:00:16 PM	H2 MFC set to  0.000000
7/20/2010	3:00:16 PM	BCl3 MFC set to  0.000000
7/20/2010	3:00:16 PM	PHl3 MFC set to  0.000000
7/20/2010	3:00:16 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:00:16 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:00:16 PM	Tube furnace set to 80
7/20/2010	3:00:59 PM	Helium valve closed
7/20/2010	3:00:59 PM	H2 valve closed
7/20/2010	3:00:59 PM	BCl3 valve closed
7/20/2010	3:00:59 PM	PH3 valve closed
7/20/2010	3:00:59 PM	SiCl4 pre valve closed
7/20/2010	3:00:59 PM	SiCl4 post valve closed
7/20/2010	3:00:59 PM	Main Vac valve closed
7/20/2010	3:00:59 PM	Bypass valve closed
7/20/2010	3:00:59 PM	Bubbler valve closed
7/20/2010	3:00:59 PM	Helium MFC set to  0.000000
7/20/2010	3:00:59 PM	H2 MFC set to  0.000000
7/20/2010	3:00:59 PM	BCl3 MFC set to  0.000000
7/20/2010	3:00:59 PM	PHl3 MFC set to  0.000000
7/20/2010	3:00:59 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:00:59 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:00:59 PM	Tube furnace set to 80
7/20/2010	3:01:14 PM	Helium valve closed
7/20/2010	3:01:14 PM	H2 valve closed
7/20/2010	3:01:14 PM	BCl3 valve closed
7/20/2010	3:01:14 PM	PH3 valve closed
7/20/2010	3:01:14 PM	SiCl4 pre valve closed
7/20/2010	3:01:14 PM	SiCl4 post valve closed
7/20/2010	3:01:14 PM	Main Vac valve closed
7/20/2010	3:01:14 PM	Bubbler valve closed
7/20/2010	3:01:14 PM	Bypass valve opened
7/20/2010	3:01:14 PM	Helium MFC set to  0.000000
7/20/2010	3:01:14 PM	H2 MFC set to  0.000000
7/20/2010	3:01:14 PM	BCl3 MFC set to  0.000000
7/20/2010	3:01:14 PM	PHl3 MFC set to  0.000000
7/20/2010	3:01:14 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:01:14 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:01:14 PM	Tube furnace set to 80
7/20/2010	3:01:36 PM	Helium valve closed
7/20/2010	3:01:36 PM	H2 valve closed
7/20/2010	3:01:36 PM	BCl3 valve closed
7/20/2010	3:01:36 PM	PH3 valve closed
7/20/2010	3:01:36 PM	SiCl4 pre valve closed
7/20/2010	3:01:36 PM	SiCl4 post valve closed
7/20/2010	3:01:36 PM	Bubbler valve closed
7/20/2010	3:01:36 PM	Main Vac valve opened
7/20/2010	3:01:36 PM	Bypass valve opened
7/20/2010	3:01:36 PM	Helium MFC set to  0.000000
7/20/2010	3:01:36 PM	H2 MFC set to  0.000000
7/20/2010	3:01:36 PM	BCl3 MFC set to  0.000000
7/20/2010	3:01:36 PM	PHl3 MFC set to  0.000000
7/20/2010	3:01:36 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:01:36 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:01:36 PM	Tube furnace set to 80
7/20/2010	3:04:36 PM	H2 valve closed
7/20/2010	3:04:36 PM	BCl3 valve closed
7/20/2010	3:04:36 PM	PH3 valve closed
7/20/2010	3:04:36 PM	SiCl4 pre valve closed
7/20/2010	3:04:36 PM	SiCl4 post valve closed
7/20/2010	3:04:36 PM	Main Vac valve closed
7/20/2010	3:04:36 PM	Bypass valve closed
7/20/2010	3:04:36 PM	Bubbler valve closed
7/20/2010	3:04:36 PM	Helium valve opened
7/20/2010	3:04:36 PM	Helium MFC set to  500.000000
7/20/2010	3:04:36 PM	H2 MFC set to  0.000000
7/20/2010	3:04:36 PM	BCl3 MFC set to  0.000000
7/20/2010	3:04:36 PM	PHl3 MFC set to  0.000000
7/20/2010	3:04:36 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:04:36 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:04:36 PM	Tube furnace set to 80
7/20/2010	3:05:18 PM	Helium valve closed
7/20/2010	3:05:18 PM	H2 valve closed
7/20/2010	3:05:18 PM	BCl3 valve closed
7/20/2010	3:05:18 PM	PH3 valve closed
7/20/2010	3:05:18 PM	SiCl4 pre valve closed
7/20/2010	3:05:18 PM	SiCl4 post valve closed
7/20/2010	3:05:18 PM	Main Vac valve closed
7/20/2010	3:05:18 PM	Bypass valve closed
7/20/2010	3:05:18 PM	Bubbler valve closed
7/20/2010	3:05:18 PM	Helium MFC set to  0.000000
7/20/2010	3:05:18 PM	H2 MFC set to  0.000000
7/20/2010	3:05:18 PM	BCl3 MFC set to  0.000000
7/20/2010	3:05:18 PM	PHl3 MFC set to  0.000000
7/20/2010	3:05:18 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:05:18 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:05:18 PM	Tube furnace set to 80
7/20/2010	3:05:33 PM	Helium valve closed
7/20/2010	3:05:33 PM	H2 valve closed
7/20/2010	3:05:33 PM	BCl3 valve closed
7/20/2010	3:05:33 PM	PH3 valve closed
7/20/2010	3:05:33 PM	SiCl4 pre valve closed
7/20/2010	3:05:33 PM	SiCl4 post valve closed
7/20/2010	3:05:33 PM	Main Vac valve closed
7/20/2010	3:05:33 PM	Bubbler valve closed
7/20/2010	3:05:33 PM	Bypass valve opened
7/20/2010	3:05:33 PM	Helium MFC set to  0.000000
7/20/2010	3:05:33 PM	H2 MFC set to  0.000000
7/20/2010	3:05:33 PM	BCl3 MFC set to  0.000000
7/20/2010	3:05:33 PM	PHl3 MFC set to  0.000000
7/20/2010	3:05:33 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:05:33 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:05:33 PM	Tube furnace set to 80
7/20/2010	3:05:55 PM	Helium valve closed
7/20/2010	3:05:55 PM	H2 valve closed
7/20/2010	3:05:55 PM	BCl3 valve closed
7/20/2010	3:05:55 PM	PH3 valve closed
7/20/2010	3:05:55 PM	SiCl4 pre valve closed
7/20/2010	3:05:55 PM	SiCl4 post valve closed
7/20/2010	3:05:55 PM	Bubbler valve closed
7/20/2010	3:05:55 PM	Main Vac valve opened
7/20/2010	3:05:55 PM	Bypass valve opened
7/20/2010	3:05:55 PM	Helium MFC set to  0.000000
7/20/2010	3:05:55 PM	H2 MFC set to  0.000000
7/20/2010	3:05:55 PM	BCl3 MFC set to  0.000000
7/20/2010	3:05:55 PM	PHl3 MFC set to  0.000000
7/20/2010	3:05:55 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:05:55 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:05:55 PM	Tube furnace set to 80
7/20/2010	3:08:55 PM	Helium valve closed
7/20/2010	3:08:55 PM	H2 valve closed
7/20/2010	3:08:55 PM	BCl3 valve closed
7/20/2010	3:08:55 PM	PH3 valve closed
7/20/2010	3:08:55 PM	SiCl4 pre valve closed
7/20/2010	3:08:55 PM	SiCl4 post valve closed
7/20/2010	3:08:55 PM	Bubbler valve closed
7/20/2010	3:08:55 PM	Main Vac valve opened
7/20/2010	3:08:55 PM	Bypass valve opened
7/20/2010	3:08:55 PM	Helium MFC set to  0.000000
7/20/2010	3:08:55 PM	H2 MFC set to  0.000000
7/20/2010	3:08:55 PM	BCl3 MFC set to  0.000000
7/20/2010	3:08:55 PM	PHl3 MFC set to  0.000000
7/20/2010	3:08:55 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:08:55 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:08:55 PM	Tube furnace set to 0
7/20/2010	3:08:56 PM	Run finished at 3:08 PM
7/20/2010	3:25:38 PM	Main Vac valve closed
7/20/2010	3:25:40 PM	Bypass valve closed
7/20/2010	3:25:54 PM	Main Vac valve opened
7/20/2010	3:25:56 PM	Bypass valve opened
7/20/2010	3:27:13 PM	Recipe started at 3:27 PM
7/20/2010	3:27:13 PM	Helium valve closed
7/20/2010	3:27:13 PM	BCl3 valve closed
7/20/2010	3:27:13 PM	PH3 valve closed
7/20/2010	3:27:13 PM	SiCl4 pre valve closed
7/20/2010	3:27:13 PM	SiCl4 post valve closed
7/20/2010	3:27:13 PM	Main Vac valve closed
7/20/2010	3:27:13 PM	Bypass valve closed
7/20/2010	3:27:13 PM	Bubbler valve closed
7/20/2010	3:27:13 PM	H2 valve opened
7/20/2010	3:27:13 PM	Helium MFC set to  0.000000
7/20/2010	3:27:13 PM	H2 MFC set to  500.000000
7/20/2010	3:27:13 PM	BCl3 MFC set to  0.000000
7/20/2010	3:27:13 PM	PHl3 MFC set to  0.000000
7/20/2010	3:27:13 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:27:13 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:27:13 PM	Tube furnace set to 0
7/20/2010	3:28:34 PM	Helium valve closed
7/20/2010	3:28:34 PM	BCl3 valve closed
7/20/2010	3:28:34 PM	PH3 valve closed
7/20/2010	3:28:34 PM	SiCl4 pre valve closed
7/20/2010	3:28:34 PM	SiCl4 post valve closed
7/20/2010	3:28:34 PM	Main Vac valve closed
7/20/2010	3:28:34 PM	Bypass valve closed
7/20/2010	3:28:34 PM	H2 valve opened
7/20/2010	3:28:34 PM	Bubbler valve opened
7/20/2010	3:28:34 PM	Helium MFC set to  0.000000
7/20/2010	3:28:34 PM	H2 MFC set to  500.000000
7/20/2010	3:28:34 PM	BCl3 MFC set to  0.000000
7/20/2010	3:28:34 PM	PHl3 MFC set to  0.000000
7/20/2010	3:28:34 PM	SiCl4 MFC set to  0.000000
7/20/2010	3:28:34 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:28:34 PM	Tube furnace set to 1000
7/20/2010	3:48:34 PM	Helium valve closed
7/20/2010	3:48:34 PM	BCl3 valve closed
7/20/2010	3:48:34 PM	Main Vac valve closed
7/20/2010	3:48:34 PM	Bypass valve closed
7/20/2010	3:48:34 PM	H2 valve opened
7/20/2010	3:48:34 PM	PH3 valve opened
7/20/2010	3:48:34 PM	SiCl4 pre valve opened
7/20/2010	3:48:34 PM	SiCl4 post valve opened
7/20/2010	3:48:34 PM	Bubbler valve opened
7/20/2010	3:48:34 PM	Helium MFC set to  0.000000
7/20/2010	3:48:34 PM	H2 MFC set to  500.000000
7/20/2010	3:48:34 PM	BCl3 MFC set to  0.000000
7/20/2010	3:48:34 PM	PHl3 MFC set to  0.200000
7/20/2010	3:48:34 PM	SiCl4 MFC set to  50.000000
7/20/2010	3:48:34 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	3:48:34 PM	Tube furnace set to 1000
7/20/2010	4:03:34 PM	H2 valve closed
7/20/2010	4:03:34 PM	BCl3 valve closed
7/20/2010	4:03:34 PM	PH3 valve closed
7/20/2010	4:03:34 PM	SiCl4 pre valve closed
7/20/2010	4:03:34 PM	SiCl4 post valve closed
7/20/2010	4:03:34 PM	Main Vac valve closed
7/20/2010	4:03:34 PM	Bypass valve closed
7/20/2010	4:03:34 PM	Helium valve opened
7/20/2010	4:03:34 PM	Bubbler valve opened
7/20/2010	4:03:34 PM	Helium MFC set to  500.000000
7/20/2010	4:03:34 PM	H2 MFC set to  0.000000
7/20/2010	4:03:34 PM	BCl3 MFC set to  0.000000
7/20/2010	4:03:34 PM	PHl3 MFC set to  0.000000
7/20/2010	4:03:34 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:03:34 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:03:34 PM	Tube furnace set to 0
7/20/2010	4:17:36 PM	Run aborted at 4:17 PM
7/20/2010	4:17:36 PM	Helium valve closed
7/20/2010	4:17:36 PM	H2 valve closed
7/20/2010	4:17:36 PM	BCl3 valve closed
7/20/2010	4:17:36 PM	PH3 valve closed
7/20/2010	4:17:36 PM	SiCl4 pre valve closed
7/20/2010	4:17:36 PM	SiCl4 post valve closed
7/20/2010	4:17:36 PM	Bypass valve closed
7/20/2010	4:17:36 PM	Main Vac valve closed
7/20/2010	4:17:36 PM	Bubbler valve closed
7/20/2010	4:17:36 PM	Helium MFC set to  0.000000
7/20/2010	4:17:36 PM	H2 MFC set to  0.000000
7/20/2010	4:17:36 PM	BCl3 MFC set to  0.000000
7/20/2010	4:17:36 PM	PHl3 MFC set to  0.000000
7/20/2010	4:17:36 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:17:36 PM	Tube furnace set to 0
7/20/2010	4:22:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	4:22:29 PM	Recipe started at 4:22 PM
7/20/2010	4:22:29 PM	Helium valve closed
7/20/2010	4:22:29 PM	H2 valve closed
7/20/2010	4:22:29 PM	BCl3 valve closed
7/20/2010	4:22:29 PM	PH3 valve closed
7/20/2010	4:22:29 PM	SiCl4 pre valve closed
7/20/2010	4:22:29 PM	SiCl4 post valve closed
7/20/2010	4:22:29 PM	Main Vac valve closed
7/20/2010	4:22:29 PM	Bubbler valve closed
7/20/2010	4:22:29 PM	Bypass valve opened
7/20/2010	4:22:29 PM	Helium MFC set to  0.000000
7/20/2010	4:22:29 PM	H2 MFC set to  0.000000
7/20/2010	4:22:29 PM	BCl3 MFC set to  0.000000
7/20/2010	4:22:29 PM	PHl3 MFC set to  0.000000
7/20/2010	4:22:29 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:22:29 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:22:30 PM	Tube furnace set to 0
7/20/2010	4:23:04 PM	Helium valve closed
7/20/2010	4:23:04 PM	H2 valve closed
7/20/2010	4:23:04 PM	BCl3 valve closed
7/20/2010	4:23:04 PM	PH3 valve closed
7/20/2010	4:23:04 PM	SiCl4 pre valve closed
7/20/2010	4:23:04 PM	SiCl4 post valve closed
7/20/2010	4:23:04 PM	Bubbler valve closed
7/20/2010	4:23:04 PM	Main Vac valve opened
7/20/2010	4:23:04 PM	Bypass valve opened
7/20/2010	4:23:04 PM	Helium MFC set to  0.000000
7/20/2010	4:23:04 PM	H2 MFC set to  0.000000
7/20/2010	4:23:04 PM	BCl3 MFC set to  0.000000
7/20/2010	4:23:04 PM	PHl3 MFC set to  0.000000
7/20/2010	4:23:04 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:23:04 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:23:05 PM	Tube furnace set to 0
7/20/2010	4:23:05 PM	Run finished at 4:23 PM
7/20/2010	4:23:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	4:28:43 PM	Recipe started at 4:28 PM
7/20/2010	4:28:43 PM	H2 valve closed
7/20/2010	4:28:43 PM	BCl3 valve closed
7/20/2010	4:28:43 PM	PH3 valve closed
7/20/2010	4:28:43 PM	SiCl4 pre valve closed
7/20/2010	4:28:43 PM	SiCl4 post valve closed
7/20/2010	4:28:43 PM	Main Vac valve closed
7/20/2010	4:28:43 PM	Bypass valve closed
7/20/2010	4:28:43 PM	Bubbler valve closed
7/20/2010	4:28:43 PM	Helium valve opened
7/20/2010	4:28:43 PM	Helium MFC set to  500.000000
7/20/2010	4:28:43 PM	H2 MFC set to  0.000000
7/20/2010	4:28:43 PM	BCl3 MFC set to  0.000000
7/20/2010	4:28:43 PM	PHl3 MFC set to  0.000000
7/20/2010	4:28:43 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:28:43 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:28:44 PM	Tube furnace set to 80
7/20/2010	4:29:24 PM	Helium valve closed
7/20/2010	4:29:24 PM	H2 valve closed
7/20/2010	4:29:24 PM	BCl3 valve closed
7/20/2010	4:29:24 PM	PH3 valve closed
7/20/2010	4:29:24 PM	SiCl4 pre valve closed
7/20/2010	4:29:24 PM	SiCl4 post valve closed
7/20/2010	4:29:24 PM	Main Vac valve closed
7/20/2010	4:29:24 PM	Bypass valve closed
7/20/2010	4:29:24 PM	Bubbler valve closed
7/20/2010	4:29:24 PM	Helium MFC set to  0.000000
7/20/2010	4:29:24 PM	H2 MFC set to  0.000000
7/20/2010	4:29:24 PM	BCl3 MFC set to  0.000000
7/20/2010	4:29:24 PM	PHl3 MFC set to  0.000000
7/20/2010	4:29:24 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:29:24 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:29:24 PM	Tube furnace set to 80
7/20/2010	4:29:39 PM	Helium valve closed
7/20/2010	4:29:39 PM	H2 valve closed
7/20/2010	4:29:39 PM	BCl3 valve closed
7/20/2010	4:29:39 PM	PH3 valve closed
7/20/2010	4:29:39 PM	SiCl4 pre valve closed
7/20/2010	4:29:39 PM	SiCl4 post valve closed
7/20/2010	4:29:39 PM	Main Vac valve closed
7/20/2010	4:29:39 PM	Bubbler valve closed
7/20/2010	4:29:39 PM	Bypass valve opened
7/20/2010	4:29:39 PM	Helium MFC set to  0.000000
7/20/2010	4:29:39 PM	H2 MFC set to  0.000000
7/20/2010	4:29:39 PM	BCl3 MFC set to  0.000000
7/20/2010	4:29:39 PM	PHl3 MFC set to  0.000000
7/20/2010	4:29:39 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:29:39 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:29:39 PM	Tube furnace set to 80
7/20/2010	4:30:00 PM	Helium valve closed
7/20/2010	4:30:00 PM	H2 valve closed
7/20/2010	4:30:00 PM	BCl3 valve closed
7/20/2010	4:30:00 PM	PH3 valve closed
7/20/2010	4:30:00 PM	SiCl4 pre valve closed
7/20/2010	4:30:00 PM	SiCl4 post valve closed
7/20/2010	4:30:00 PM	Bubbler valve closed
7/20/2010	4:30:00 PM	Main Vac valve opened
7/20/2010	4:30:00 PM	Bypass valve opened
7/20/2010	4:30:00 PM	Helium MFC set to  0.000000
7/20/2010	4:30:00 PM	H2 MFC set to  0.000000
7/20/2010	4:30:00 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:00 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:00 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:00 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:00 PM	Tube furnace set to 80
7/20/2010	4:30:24 PM	H2 valve closed
7/20/2010	4:30:24 PM	BCl3 valve closed
7/20/2010	4:30:24 PM	PH3 valve closed
7/20/2010	4:30:24 PM	SiCl4 pre valve closed
7/20/2010	4:30:24 PM	SiCl4 post valve closed
7/20/2010	4:30:24 PM	Main Vac valve closed
7/20/2010	4:30:24 PM	Bypass valve closed
7/20/2010	4:30:24 PM	Bubbler valve closed
7/20/2010	4:30:24 PM	Helium valve opened
7/20/2010	4:30:24 PM	Helium MFC set to  500.000000
7/20/2010	4:30:24 PM	H2 MFC set to  0.000000
7/20/2010	4:30:24 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:24 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:24 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:24 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:24 PM	Tube furnace set to 80
7/20/2010	4:30:26 PM	Helium valve closed
7/20/2010	4:30:26 PM	H2 valve closed
7/20/2010	4:30:26 PM	BCl3 valve closed
7/20/2010	4:30:26 PM	PH3 valve closed
7/20/2010	4:30:26 PM	SiCl4 pre valve closed
7/20/2010	4:30:26 PM	SiCl4 post valve closed
7/20/2010	4:30:26 PM	Main Vac valve closed
7/20/2010	4:30:26 PM	Bypass valve closed
7/20/2010	4:30:26 PM	Bubbler valve closed
7/20/2010	4:30:26 PM	Helium MFC set to  0.000000
7/20/2010	4:30:26 PM	H2 MFC set to  0.000000
7/20/2010	4:30:26 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:26 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:26 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:26 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:26 PM	Tube furnace set to 80
7/20/2010	4:30:27 PM	Helium valve closed
7/20/2010	4:30:27 PM	H2 valve closed
7/20/2010	4:30:27 PM	BCl3 valve closed
7/20/2010	4:30:27 PM	PH3 valve closed
7/20/2010	4:30:27 PM	SiCl4 pre valve closed
7/20/2010	4:30:27 PM	SiCl4 post valve closed
7/20/2010	4:30:27 PM	Main Vac valve closed
7/20/2010	4:30:27 PM	Bubbler valve closed
7/20/2010	4:30:27 PM	Bypass valve opened
7/20/2010	4:30:27 PM	Helium MFC set to  0.000000
7/20/2010	4:30:27 PM	H2 MFC set to  0.000000
7/20/2010	4:30:27 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:27 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:27 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:27 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:27 PM	Tube furnace set to 80
7/20/2010	4:30:27 PM	Helium valve closed
7/20/2010	4:30:27 PM	H2 valve closed
7/20/2010	4:30:27 PM	BCl3 valve closed
7/20/2010	4:30:27 PM	PH3 valve closed
7/20/2010	4:30:27 PM	SiCl4 pre valve closed
7/20/2010	4:30:27 PM	SiCl4 post valve closed
7/20/2010	4:30:27 PM	Bubbler valve closed
7/20/2010	4:30:27 PM	Main Vac valve opened
7/20/2010	4:30:27 PM	Bypass valve opened
7/20/2010	4:30:27 PM	Helium MFC set to  0.000000
7/20/2010	4:30:27 PM	H2 MFC set to  0.000000
7/20/2010	4:30:27 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:27 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:27 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:27 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:27 PM	Tube furnace set to 80
7/20/2010	4:30:28 PM	Run aborted at 4:30 PM
7/20/2010	4:30:28 PM	Helium valve closed
7/20/2010	4:30:28 PM	H2 valve closed
7/20/2010	4:30:28 PM	BCl3 valve closed
7/20/2010	4:30:28 PM	PH3 valve closed
7/20/2010	4:30:28 PM	SiCl4 pre valve closed
7/20/2010	4:30:28 PM	SiCl4 post valve closed
7/20/2010	4:30:28 PM	Bypass valve closed
7/20/2010	4:30:28 PM	Main Vac valve closed
7/20/2010	4:30:28 PM	Bubbler valve closed
7/20/2010	4:30:28 PM	Helium MFC set to  0.000000
7/20/2010	4:30:28 PM	H2 MFC set to  0.000000
7/20/2010	4:30:28 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:28 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:28 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:28 PM	Tube furnace set to 0
7/20/2010	4:30:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	4:30:31 PM	Recipe started at 4:30 PM
7/20/2010	4:30:31 PM	Helium valve closed
7/20/2010	4:30:31 PM	H2 valve closed
7/20/2010	4:30:31 PM	BCl3 valve closed
7/20/2010	4:30:31 PM	PH3 valve closed
7/20/2010	4:30:31 PM	SiCl4 pre valve closed
7/20/2010	4:30:31 PM	SiCl4 post valve closed
7/20/2010	4:30:31 PM	Main Vac valve closed
7/20/2010	4:30:31 PM	Bubbler valve closed
7/20/2010	4:30:31 PM	Bypass valve opened
7/20/2010	4:30:31 PM	Helium MFC set to  0.000000
7/20/2010	4:30:31 PM	H2 MFC set to  0.000000
7/20/2010	4:30:31 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:31 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:31 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:31 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:32 PM	Tube furnace set to 0
7/20/2010	4:30:32 PM	Helium valve closed
7/20/2010	4:30:32 PM	H2 valve closed
7/20/2010	4:30:32 PM	BCl3 valve closed
7/20/2010	4:30:32 PM	PH3 valve closed
7/20/2010	4:30:32 PM	SiCl4 pre valve closed
7/20/2010	4:30:32 PM	SiCl4 post valve closed
7/20/2010	4:30:32 PM	Bubbler valve closed
7/20/2010	4:30:32 PM	Main Vac valve opened
7/20/2010	4:30:32 PM	Bypass valve opened
7/20/2010	4:30:32 PM	Helium MFC set to  0.000000
7/20/2010	4:30:32 PM	H2 MFC set to  0.000000
7/20/2010	4:30:32 PM	BCl3 MFC set to  0.000000
7/20/2010	4:30:32 PM	PHl3 MFC set to  0.000000
7/20/2010	4:30:32 PM	SiCl4 MFC set to  0.000000
7/20/2010	4:30:32 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	4:30:32 PM	Tube furnace set to 0
7/20/2010	4:30:32 PM	Run finished at 4:30 PM
7/20/2010	4:30:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	4:30:52 PM	Helium MFC set to  100.000000
7/20/2010	4:30:57 PM	Helium valve opened
7/20/2010	4:32:31 PM	Helium valve closed
7/20/2010	4:34:06 PM	Helium valve opened
7/20/2010	5:01:38 PM	Helium valve closed
7/20/2010	5:02:42 PM	Helium valve opened
7/20/2010	5:19:00 PM	Helium valve closed
7/20/2010	5:39:16 PM	Helium valve opened
7/20/2010	5:42:17 PM	Helium valve closed
7/20/2010	5:43:20 PM	Main Vac valve closed
7/20/2010	5:43:21 PM	Bypass valve closed
7/20/2010	5:43:34 PM	Bypass valve opened
7/20/2010	5:43:34 PM	Main Vac valve opened
7/20/2010	5:45:16 PM	Recipe started at 5:45 PM
7/20/2010	5:45:16 PM	Helium valve closed
7/20/2010	5:45:16 PM	BCl3 valve closed
7/20/2010	5:45:16 PM	PH3 valve closed
7/20/2010	5:45:16 PM	SiCl4 pre valve closed
7/20/2010	5:45:16 PM	SiCl4 post valve closed
7/20/2010	5:45:16 PM	Main Vac valve closed
7/20/2010	5:45:16 PM	Bypass valve closed
7/20/2010	5:45:16 PM	Bubbler valve closed
7/20/2010	5:45:16 PM	H2 valve opened
7/20/2010	5:45:16 PM	Helium MFC set to  0.000000
7/20/2010	5:45:16 PM	H2 MFC set to  500.000000
7/20/2010	5:45:16 PM	BCl3 MFC set to  0.000000
7/20/2010	5:45:16 PM	PHl3 MFC set to  0.000000
7/20/2010	5:45:16 PM	SiCl4 MFC set to  0.000000
7/20/2010	5:45:16 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	5:45:16 PM	Tube furnace set to 0
7/20/2010	5:46:34 PM	Helium valve closed
7/20/2010	5:46:34 PM	BCl3 valve closed
7/20/2010	5:46:34 PM	PH3 valve closed
7/20/2010	5:46:34 PM	SiCl4 pre valve closed
7/20/2010	5:46:34 PM	SiCl4 post valve closed
7/20/2010	5:46:34 PM	Main Vac valve closed
7/20/2010	5:46:34 PM	Bypass valve closed
7/20/2010	5:46:34 PM	H2 valve opened
7/20/2010	5:46:34 PM	Bubbler valve opened
7/20/2010	5:46:34 PM	Helium MFC set to  0.000000
7/20/2010	5:46:34 PM	H2 MFC set to  500.000000
7/20/2010	5:46:34 PM	BCl3 MFC set to  0.000000
7/20/2010	5:46:34 PM	PHl3 MFC set to  0.000000
7/20/2010	5:46:34 PM	SiCl4 MFC set to  0.000000
7/20/2010	5:46:34 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	5:46:35 PM	Tube furnace set to 1000
7/20/2010	6:06:35 PM	Helium valve closed
7/20/2010	6:06:35 PM	BCl3 valve closed
7/20/2010	6:06:35 PM	Main Vac valve closed
7/20/2010	6:06:35 PM	Bypass valve closed
7/20/2010	6:06:35 PM	H2 valve opened
7/20/2010	6:06:35 PM	PH3 valve opened
7/20/2010	6:06:35 PM	SiCl4 pre valve opened
7/20/2010	6:06:35 PM	SiCl4 post valve opened
7/20/2010	6:06:35 PM	Bubbler valve opened
7/20/2010	6:06:35 PM	Helium MFC set to  0.000000
7/20/2010	6:06:35 PM	H2 MFC set to  500.000000
7/20/2010	6:06:35 PM	BCl3 MFC set to  0.000000
7/20/2010	6:06:35 PM	PHl3 MFC set to  0.200000
7/20/2010	6:06:35 PM	SiCl4 MFC set to  50.000000
7/20/2010	6:06:35 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	6:06:35 PM	Tube furnace set to 1000
7/20/2010	6:21:35 PM	H2 valve closed
7/20/2010	6:21:35 PM	BCl3 valve closed
7/20/2010	6:21:35 PM	PH3 valve closed
7/20/2010	6:21:35 PM	SiCl4 pre valve closed
7/20/2010	6:21:35 PM	SiCl4 post valve closed
7/20/2010	6:21:35 PM	Main Vac valve closed
7/20/2010	6:21:35 PM	Bypass valve closed
7/20/2010	6:21:35 PM	Helium valve opened
7/20/2010	6:21:35 PM	Bubbler valve opened
7/20/2010	6:21:35 PM	Helium MFC set to  500.000000
7/20/2010	6:21:35 PM	H2 MFC set to  0.000000
7/20/2010	6:21:35 PM	BCl3 MFC set to  0.000000
7/20/2010	6:21:35 PM	PHl3 MFC set to  0.000000
7/20/2010	6:21:35 PM	SiCl4 MFC set to  0.000000
7/20/2010	6:21:35 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	6:21:35 PM	Tube furnace set to 0
7/20/2010	6:35:30 PM	Run aborted at 6:35 PM
7/20/2010	6:35:30 PM	Helium valve closed
7/20/2010	6:35:30 PM	H2 valve closed
7/20/2010	6:35:30 PM	BCl3 valve closed
7/20/2010	6:35:30 PM	PH3 valve closed
7/20/2010	6:35:30 PM	SiCl4 pre valve closed
7/20/2010	6:35:30 PM	SiCl4 post valve closed
7/20/2010	6:35:30 PM	Bypass valve closed
7/20/2010	6:35:30 PM	Main Vac valve closed
7/20/2010	6:35:30 PM	Bubbler valve closed
7/20/2010	6:35:30 PM	Helium MFC set to  0.000000
7/20/2010	6:35:30 PM	H2 MFC set to  0.000000
7/20/2010	6:35:30 PM	BCl3 MFC set to  0.000000
7/20/2010	6:35:30 PM	PHl3 MFC set to  0.000000
7/20/2010	6:35:30 PM	SiCl4 MFC set to  0.000000
7/20/2010	6:35:30 PM	Tube furnace set to 0
7/20/2010	6:46:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	6:46:21 PM	Recipe started at 6:46 PM
7/20/2010	6:46:21 PM	Helium valve closed
7/20/2010	6:46:21 PM	H2 valve closed
7/20/2010	6:46:21 PM	BCl3 valve closed
7/20/2010	6:46:21 PM	PH3 valve closed
7/20/2010	6:46:21 PM	SiCl4 pre valve closed
7/20/2010	6:46:21 PM	SiCl4 post valve closed
7/20/2010	6:46:21 PM	Main Vac valve closed
7/20/2010	6:46:21 PM	Bubbler valve closed
7/20/2010	6:46:21 PM	Bypass valve opened
7/20/2010	6:46:21 PM	Helium MFC set to  0.000000
7/20/2010	6:46:21 PM	H2 MFC set to  0.000000
7/20/2010	6:46:21 PM	BCl3 MFC set to  0.000000
7/20/2010	6:46:21 PM	PHl3 MFC set to  0.000000
7/20/2010	6:46:21 PM	SiCl4 MFC set to  0.000000
7/20/2010	6:46:21 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	6:46:21 PM	Tube furnace set to 0
7/20/2010	6:46:56 PM	Helium valve closed
7/20/2010	6:46:56 PM	H2 valve closed
7/20/2010	6:46:56 PM	BCl3 valve closed
7/20/2010	6:46:56 PM	PH3 valve closed
7/20/2010	6:46:56 PM	SiCl4 pre valve closed
7/20/2010	6:46:56 PM	SiCl4 post valve closed
7/20/2010	6:46:56 PM	Bubbler valve closed
7/20/2010	6:46:56 PM	Main Vac valve opened
7/20/2010	6:46:56 PM	Bypass valve opened
7/20/2010	6:46:56 PM	Helium MFC set to  0.000000
7/20/2010	6:46:56 PM	H2 MFC set to  0.000000
7/20/2010	6:46:56 PM	BCl3 MFC set to  0.000000
7/20/2010	6:46:56 PM	PHl3 MFC set to  0.000000
7/20/2010	6:46:56 PM	SiCl4 MFC set to  0.000000
7/20/2010	6:46:56 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	6:46:56 PM	Tube furnace set to 0
7/20/2010	6:46:57 PM	Run finished at 6:46 PM
7/20/2010	6:46:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	6:53:28 PM	Helium MFC set to  100.000000
7/20/2010	6:53:30 PM	Helium valve opened
7/20/2010	7:28:53 PM	Helium valve closed
7/20/2010	7:29:58 PM	Main Vac valve closed
7/20/2010	7:30:00 PM	Main Vac valve opened
7/20/2010	10:15:46 PM	Helium valve opened
7/20/2010	10:33:56 PM	Helium valve closed
7/20/2010	10:35:54 PM	Bypass valve closed
7/20/2010	10:35:55 PM	Main Vac valve closed
7/20/2010	10:36:14 PM	Main Vac valve opened
7/20/2010	10:36:14 PM	Bypass valve opened
7/20/2010	10:36:26 PM	Recipe started at 10:36 PM
7/20/2010	10:36:26 PM	Helium valve closed
7/20/2010	10:36:26 PM	BCl3 valve closed
7/20/2010	10:36:26 PM	PH3 valve closed
7/20/2010	10:36:26 PM	SiCl4 pre valve closed
7/20/2010	10:36:26 PM	SiCl4 post valve closed
7/20/2010	10:36:26 PM	Main Vac valve closed
7/20/2010	10:36:26 PM	Bypass valve closed
7/20/2010	10:36:26 PM	Bubbler valve closed
7/20/2010	10:36:26 PM	H2 valve opened
7/20/2010	10:36:26 PM	Helium MFC set to  0.000000
7/20/2010	10:36:26 PM	H2 MFC set to  500.000000
7/20/2010	10:36:26 PM	BCl3 MFC set to  0.000000
7/20/2010	10:36:26 PM	PHl3 MFC set to  0.000000
7/20/2010	10:36:26 PM	SiCl4 MFC set to  0.000000
7/20/2010	10:36:26 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	10:36:26 PM	Tube furnace set to 0
7/20/2010	10:37:48 PM	Helium valve closed
7/20/2010	10:37:48 PM	BCl3 valve closed
7/20/2010	10:37:48 PM	PH3 valve closed
7/20/2010	10:37:48 PM	SiCl4 pre valve closed
7/20/2010	10:37:48 PM	SiCl4 post valve closed
7/20/2010	10:37:48 PM	Main Vac valve closed
7/20/2010	10:37:48 PM	Bypass valve closed
7/20/2010	10:37:48 PM	H2 valve opened
7/20/2010	10:37:48 PM	Bubbler valve opened
7/20/2010	10:37:48 PM	Helium MFC set to  0.000000
7/20/2010	10:37:48 PM	H2 MFC set to  500.000000
7/20/2010	10:37:48 PM	BCl3 MFC set to  0.000000
7/20/2010	10:37:48 PM	PHl3 MFC set to  0.000000
7/20/2010	10:37:48 PM	SiCl4 MFC set to  0.000000
7/20/2010	10:37:48 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	10:37:48 PM	Tube furnace set to 1000
7/20/2010	10:57:48 PM	Helium valve closed
7/20/2010	10:57:48 PM	BCl3 valve closed
7/20/2010	10:57:48 PM	Main Vac valve closed
7/20/2010	10:57:48 PM	Bypass valve closed
7/20/2010	10:57:48 PM	H2 valve opened
7/20/2010	10:57:48 PM	PH3 valve opened
7/20/2010	10:57:48 PM	SiCl4 pre valve opened
7/20/2010	10:57:48 PM	SiCl4 post valve opened
7/20/2010	10:57:48 PM	Bubbler valve opened
7/20/2010	10:57:48 PM	Helium MFC set to  0.000000
7/20/2010	10:57:48 PM	H2 MFC set to  500.000000
7/20/2010	10:57:48 PM	BCl3 MFC set to  0.000000
7/20/2010	10:57:48 PM	PHl3 MFC set to  1.000000
7/20/2010	10:57:48 PM	SiCl4 MFC set to  50.000000
7/20/2010	10:57:48 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	10:57:48 PM	Tube furnace set to 1000
7/20/2010	11:17:48 PM	H2 valve closed
7/20/2010	11:17:48 PM	BCl3 valve closed
7/20/2010	11:17:48 PM	PH3 valve closed
7/20/2010	11:17:48 PM	SiCl4 pre valve closed
7/20/2010	11:17:48 PM	SiCl4 post valve closed
7/20/2010	11:17:48 PM	Main Vac valve closed
7/20/2010	11:17:48 PM	Bypass valve closed
7/20/2010	11:17:48 PM	Helium valve opened
7/20/2010	11:17:48 PM	Bubbler valve opened
7/20/2010	11:17:48 PM	Helium MFC set to  500.000000
7/20/2010	11:17:48 PM	H2 MFC set to  0.000000
7/20/2010	11:17:48 PM	BCl3 MFC set to  0.000000
7/20/2010	11:17:48 PM	PHl3 MFC set to  0.000000
7/20/2010	11:17:48 PM	SiCl4 MFC set to  0.000000
7/20/2010	11:17:48 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	11:17:48 PM	Tube furnace set to 0
7/20/2010	11:32:58 PM	Run aborted at 11:32 PM
7/20/2010	11:32:58 PM	Helium valve closed
7/20/2010	11:32:58 PM	H2 valve closed
7/20/2010	11:32:58 PM	BCl3 valve closed
7/20/2010	11:32:58 PM	PH3 valve closed
7/20/2010	11:32:58 PM	SiCl4 pre valve closed
7/20/2010	11:32:58 PM	SiCl4 post valve closed
7/20/2010	11:32:58 PM	Bypass valve closed
7/20/2010	11:32:58 PM	Main Vac valve closed
7/20/2010	11:32:58 PM	Bubbler valve closed
7/20/2010	11:32:58 PM	Helium MFC set to  0.000000
7/20/2010	11:32:58 PM	H2 MFC set to  0.000000
7/20/2010	11:32:58 PM	BCl3 MFC set to  0.000000
7/20/2010	11:32:58 PM	PHl3 MFC set to  0.000000
7/20/2010	11:32:58 PM	SiCl4 MFC set to  0.000000
7/20/2010	11:32:58 PM	Tube furnace set to 0
7/20/2010	11:33:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2010	11:33:08 PM	Recipe started at 11:33 PM
7/20/2010	11:33:08 PM	H2 valve closed
7/20/2010	11:33:08 PM	BCl3 valve closed
7/20/2010	11:33:08 PM	PH3 valve closed
7/20/2010	11:33:08 PM	SiCl4 pre valve closed
7/20/2010	11:33:08 PM	SiCl4 post valve closed
7/20/2010	11:33:08 PM	Main Vac valve closed
7/20/2010	11:33:08 PM	Bypass valve closed
7/20/2010	11:33:08 PM	Bubbler valve closed
7/20/2010	11:33:08 PM	Helium valve opened
7/20/2010	11:33:08 PM	Helium MFC set to  500.000000
7/20/2010	11:33:08 PM	H2 MFC set to  0.000000
7/20/2010	11:33:08 PM	BCl3 MFC set to  0.000000
7/20/2010	11:33:08 PM	PHl3 MFC set to  0.000000
7/20/2010	11:33:08 PM	SiCl4 MFC set to  0.000000
7/20/2010	11:33:08 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	11:33:08 PM	Tube furnace set to 0
7/20/2010	11:33:08 PM	Helium valve closed
7/20/2010	11:33:08 PM	H2 valve closed
7/20/2010	11:33:08 PM	BCl3 valve closed
7/20/2010	11:33:08 PM	PH3 valve closed
7/20/2010	11:33:08 PM	SiCl4 pre valve closed
7/20/2010	11:33:08 PM	SiCl4 post valve closed
7/20/2010	11:33:08 PM	Main Vac valve closed
7/20/2010	11:33:08 PM	Bypass valve closed
7/20/2010	11:33:08 PM	Bubbler valve closed
7/20/2010	11:33:08 PM	Helium MFC set to  0.000000
7/20/2010	11:33:08 PM	H2 MFC set to  0.000000
7/20/2010	11:33:08 PM	BCl3 MFC set to  0.000000
7/20/2010	11:33:08 PM	PHl3 MFC set to  0.000000
7/20/2010	11:33:08 PM	SiCl4 MFC set to  0.000000
7/20/2010	11:33:08 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	11:33:09 PM	Tube furnace set to 0
7/20/2010	11:33:09 PM	Run finished at 11:33 PM
7/20/2010	11:33:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2010	11:39:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	11:39:34 PM	Recipe started at 11:39 PM
7/20/2010	11:39:34 PM	Helium valve closed
7/20/2010	11:39:34 PM	H2 valve closed
7/20/2010	11:39:34 PM	BCl3 valve closed
7/20/2010	11:39:34 PM	PH3 valve closed
7/20/2010	11:39:34 PM	SiCl4 pre valve closed
7/20/2010	11:39:34 PM	SiCl4 post valve closed
7/20/2010	11:39:34 PM	Main Vac valve closed
7/20/2010	11:39:34 PM	Bubbler valve closed
7/20/2010	11:39:34 PM	Bypass valve opened
7/20/2010	11:39:34 PM	Helium MFC set to  0.000000
7/20/2010	11:39:34 PM	H2 MFC set to  0.000000
7/20/2010	11:39:34 PM	BCl3 MFC set to  0.000000
7/20/2010	11:39:34 PM	PHl3 MFC set to  0.000000
7/20/2010	11:39:34 PM	SiCl4 MFC set to  0.000000
7/20/2010	11:39:34 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	11:39:34 PM	Tube furnace set to 0
7/20/2010	11:40:09 PM	Helium valve closed
7/20/2010	11:40:09 PM	H2 valve closed
7/20/2010	11:40:09 PM	BCl3 valve closed
7/20/2010	11:40:09 PM	PH3 valve closed
7/20/2010	11:40:09 PM	SiCl4 pre valve closed
7/20/2010	11:40:09 PM	SiCl4 post valve closed
7/20/2010	11:40:09 PM	Bubbler valve closed
7/20/2010	11:40:09 PM	Main Vac valve opened
7/20/2010	11:40:09 PM	Bypass valve opened
7/20/2010	11:40:09 PM	Helium MFC set to  0.000000
7/20/2010	11:40:09 PM	H2 MFC set to  0.000000
7/20/2010	11:40:09 PM	BCl3 MFC set to  0.000000
7/20/2010	11:40:09 PM	PHl3 MFC set to  0.000000
7/20/2010	11:40:09 PM	SiCl4 MFC set to  0.000000
7/20/2010	11:40:09 PM	Bypass solenoid MFC set to  0.000000
7/20/2010	11:40:09 PM	Tube furnace set to 0
7/20/2010	11:40:09 PM	Run finished at 11:40 PM
7/20/2010	11:40:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2010	11:40:20 PM	Helium MFC set to  100.000000
7/20/2010	11:40:21 PM	Helium valve opened
7/20/2010	11:47:30 PM	Helium valve closed
